Products

RF Generator

Global provider of RF power solutions.
Serving the RF Generator and Matching unit for plasma applications.

RFPT’s RF power supplies offers the latest RF power semiconductor technology and outstanding operating features making them leading edge products.
For protecting amplifier, RF power supplies are designed with temp sensor, Reflected power Limit, Fast reflected power Limit, Power dissipation Limit, Current Limit circuit. which is used in various ways, such as deposition, etcher, cleaning, Asher, Atmospheric pressure, and Sputter systems

  • #13.56MHz RF Generators

    Power Output : 300w to 6kw

  • #2MHz RF Generators

    Power Output : 1kw to 5kw

  • #27.12MHz RF Generators

    Power Output : 1kw to 5kw

  • #400kHz LF Generators

    Power Output : 400w to 1.5kw

  • #개발예정 ITEMs

  • Features
  • Applications

  • Ultra Strong Ruggedness with wideband LDMOS technology

    Power Mode (Forward / Delivered)

    DSP control technology

    Stable output power (Balanced Amplifier)

    CEX / Phase shifter (Option)

    Frequency and Pulse modulation

    Competitive price and easy to use

  • Descum system

    PECVD system

    PEALD system

    Dry Etch system

    Coating, Sputtering system

    OLED system

    Atmospheric plasma system

    Medical

Specification (All Models)

Frequency : 13.56MHz RF Generator

SCROLL

Part Name REXi-1K REXi-1K5 REXi-3K REXi-6K
RF Power 1000W 1500W 3000W 6000W
Output Range 10W to 1000W 15W to 1500W 30W to 3000W 60W to 6000W
Size 483(W) x 500(L) x 132(H) 483(W) x 500(L) x 132(H) 483(W) x 500(L) x 132(H) 483(W) x 600(L) x 177(H)
RF Output Connector N-Type Female HN-Type Female HN-Type Female 7/16 DIN-Type Female
AC Input Power 220VAC (187VAC to 253VAC),
1Ф With Ground 		220VAC (180 VAC to 260 VAC),
3Ф with ground 		220VAC (180 VAC to 260 VAC),
3Ф with ground 		220VAC (180 VAC to 260 VAC),
3Ф with ground
AC Input Connector CE05-2A18-10PD-D-RG
(Manuf. DDK) 		MS3102A18-10P (Amphenol) MS3102A18-10P (Amphenol) H16B-BK-1L_SC
(HK-004_0-M-14355424808)
AC Current 8A 16A / line 16A / line 40A / line
Rack Mount Feature 19” rack mountable 19” rack mountable 19” rack mountable 19” rack mountable
Weight 15kg 21kg 30kg 40kg
Cooling Air Water ( >6lpm ) Water ( >6lpm ) Water ( >8lpm )
Input Water Temperature +5°C to +35°C (+41°F to+95°F) +5°C to +35°C (+41°F to+95°F) +5°C to +35°C (+41°F to +95°F)
Minimum Flow Rate > 6 lpm > 6 lpm 8 lpm

Frequency : 2MHz RF Generator

Part Name REXi-1K-2M REXi-3K-2M REXi-5K-2M
RF Power 1000W 3000W 5000W
Output Range 10W to 1000W 30W to 3000W 60W to 5000W
Size 483(W) x 500(L) x 132(H) 483(W) x 600(L) x 132(H) 483(W) x 600(L) x 211(H)
RF Output Connector N-Type Female HN-Type Female 7/16 DIN-Type Female
AC Input Power 220VAC (187VAC to 253VAC),
1Ф With Ground 		220VAC (180 VAC to 260 VAC),
3Ф with ground 		220VAC (180 VAC to 260 VAC),
3Ф with ground
AC Input Connector CE05-2A18-10PD-D-RG
(Manuf. DDK) 		MS3102A18-10P (Amphenol) H16B-BK-1L_SC
(HK-004_0-M-14355424808)
AC Current 8A 16A / line 40A / line
Rack Mount Feature 19” rack mountable 19” rack mountable 19” rack mountable
Weight 15kg 30kg 40kg
Cooling Air Water ( >6lpm ) Water ( >8lpm )
Input Water Temperature +5°C to +35°C (+41°F to+95°F) +5°C to +35°C (+41°F to +95°F)
Minimum Flow Rate > 6 lpm 8 lpm

Frequency : 27.12MHz RF Generator

Part Name REXi-1K-27M REXi-3K-27M REXi-5K-27M
RF Power 1000W 3000W 6000W
Output Range 10W to 1000W 30W to 3000W 60W to 6000W
Size 483(W) x 500(L) x 132(H) 483(W) x 500(L) x 132(H) 483(W) x 600(L) x 177(H)
RF Output Connector N-Type Female HN-Type Female 7/16 DIN-Type Female
AC Input Power 220VAC (187VAC to 253VAC),
1Ф With Ground 		220VAC (180 VAC to 260 VAC),
3Ф with ground 		220VAC (180 VAC to 260 VAC),
3Ф with ground
AC Input Connector CE05-2A18-10PD-D-RG
(Manuf. DDK) 		MS3102A18-10P (Amphenol) H16B-BK-1L_SC
(HK-004_0-M-14355424808)
AC Current 8A 16A / line 40A / line
Rack Mount Feature 19” rack mountable 19” rack mountable 19” rack mountable
Weight 15kg 30kg 40kg
Cooling Air Water ( >6lpm ) Water ( >8lpm )
Input Water Temperature +5°C to +35°C (+41°F to+95°F) +5°C to +35°C (+41°F to +95°F)
Minimum Flow Rate > 6 lpm > 8 lpm

Frequency : 13.56MHz RF Generator

Part Name REXi-400-350K
RF Power 400W
Output Range (High) 4W to 400W
Output Range (LOW) 0W to 40W
Size 483(W) x 431(L) x 89(H)
RF Output Connector N-Type Female
AC Input Power 220VAC (187VAC to 253VAC),
1Ф With Ground
AC Input Connector IEC 320 connector
AC Current 5A
Rack Mount Feature 19” rack mountable
Weight 10kg
Cooling Air
Input Water Temperature
Minimum Flow Rate

Frequency : 13.56MHz RF Generator for Industrial Market

Part Name REX-300 REX-600
RF Power 300W 600W
Output Range 1W to 300W 5W to 300W
Size 241(W) x 303(L) x 131(H) 241(W) x 480(L) x 131(H)
RF Output Connector N-Type Female HN-Type Female
AC Input Power 220VAC (187VAC to 253VAC),
1Ф With Ground 		220VAC (180 VAC to 260 VAC),
3Ф with ground
AC Input Connector ID-1022-S
(one phase noise filter type) 		ID-1022-S
(one phase noise filter type)
AC Current 6A 6A
Rack Mount Feature Compact rack mountable
(Half rack size) 		Compact rack mountable
(Half rack size)
Weight 6.7kg 8kg
Cooling Air Air